We developed a home-made sample-holder unit used for 2D nano-positioning with millimeter travelling ranges. For each
displacement axis, the system includes a long range travelling stage and a piezoelectric actuator for accurate positioning.
Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances.
The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to
characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force
Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical
images have been realized.
Near-field microscopy applications sometimes require scanning the sample over the millimetre range. This paper
describes a home-made displacement system that can replace the limited range XY scanner of a classical near-field
microscope. The system lays on a coarse/fine displacements configuration to attain the millimetre. Nanometre scale
repeatability and resolution are met thanks to a control loop based on phase shifting techniques. The system was tested
under an Atomic Force Microscope. The setup of the experiments and the results obtained are herein presented.