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Ahmed Fadil
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Publications (1)
SPIE Journal Paper | 7 August 2015
Fabrication and improvement of nanopillar InGaN/GaN light-emitting diodes using nanosphere lithography
Ahmed Fadil, Yiyu Ou, Teng Zhan, Kaiyu Wu, Dmitry Suyatin, Weifang Lu, Paul Petersen, Zhiqiang Liu, Haiyan Ou
JNP, Vol. 9, Issue 01, 093062, (August 2015) https://doi.org/10.1117/12.10.1117/1.JNP.9.093062
KEYWORDS: Light emitting diodes, Gallium nitride, Indium gallium nitride, Etching, Annealing, Reactive ion etching, Nanolithography, Picosecond phenomena, Chlorine, Lithography
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