Dr. Ahmed Gharbi
SPIE Involvement:
Publications (32)

Proceedings Article | 13 March 2024 Presentation
Proceedings Volume PC12889, PC128890C (2024) https://doi.org/10.1117/12.3001555
KEYWORDS: Silicon nitride, Quantum photonics, Thermography, Waveguides, Quantum sensing, Quantum computing, Physical vapor deposition, Photonic quantum computing, Optical sensing, Microwave radiation

Proceedings Article | 13 October 2020 Presentation + Paper
I. Servin, F. Laulagnet, M. Cannac, Ahmed Gharbi, J-A. Dallery
Proceedings Volume 11518, 115180U (2020) https://doi.org/10.1117/12.2572868
KEYWORDS: Electron beam lithography, Lithography, Deep ultraviolet, Optical alignment, 193nm lithography, Electron beam direct write lithography, Semiconducting wafers, Nanostructures, Nanolithography, Electron beams

Proceedings Article | 3 April 2020 Paper
G. Rademaker, A. Le Pennec, T. Giammaria, K. Benotmane, H. Pham, C. Bouet, M. G. Gusmao Cacho, M. Argoud, M.-L. Pourteau, A. Paquet, A. Gharbi, C. Navarro, C. Nicolet, X. Chevalier, K. Sakavuyi, P. Nealey, R. Tiron
Proceedings Volume 11326, 113260Z (2020) https://doi.org/10.1117/12.2552003
KEYWORDS: Lithography, Metrology, Directed self assembly, Immersion lithography, Photomasks, Optical lithography, Etching, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 26 March 2019 Paper
A. Paquet, A. Le Pennec, A. Gharbi, T. Giammaria, G. Rademaker, M.-L. Pourteau, D. Mariolle, C. Navarro, C. Nicolet, X. Chevalier, K. Sakavuyi, L. Pain, P. Nealey, R. Tiron
Proceedings Volume 10958, 109580M (2019) https://doi.org/10.1117/12.2514960
KEYWORDS: Etching, Lithography, Optical lithography, Wet etching, HF etching, Critical dimension metrology, Silicon, System on a chip, Tin

Proceedings Article | 19 March 2018 Presentation
Remi Le Tiec, Shimon Levi, Ahmed Gharbi, Maxime Argoud, Raluca Tiron, Gaelle Chamiot Maitral, Stephane Rey
Proceedings Volume 10586, 1058610 (2018) https://doi.org/10.1117/12.2299634
KEYWORDS: Directed self assembly, Metrology, Optical lithography, Etching, Manufacturing, 3D metrology, Materials processing, Polymers, Image processing, Scanning electron microscopy

Showing 5 of 32 publications
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