We propose a novel deformable mirror (DM) for adaptive optics in high power laser applications. The DM is made of a SiC (Silicon carbide) faceplate, and cooling channels are embedded monolithically inside the faceplate by CVD (Chemical vapor deposition) method. The faceplate is 200 mm in diameter and 3 mm in thickness, and it is actuated by 137 stack-type piezoelectric transducers arranged in a square grid. The cooling capability and optical performance of the DM are verified by simulations and actual experiments with a heat source. The DM is proved to operate at 1 kHz without the coolant flow and 100 Hz with the coolant flow, and the residual errors after compensation is less than 30 nm rms (root-mean-square). This paper presents the design, fabrication, and optical performance of the CVD SiC DM.