Dr. Aibin Yu
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 February 2008
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Silver, Indium, Interfaces, Wafer bonding, Diffusion, Gold, Solids, Semiconducting wafers, Metals, Packaging

Proceedings Article | 8 February 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Semiconducting wafers, Micromirrors, Mirrors, Wafer bonding, Microelectromechanical systems, Packaging, Silver, Interfaces, Actuators, Finite element methods

Proceedings Article | 1 February 2008
Proc. SPIE. 6900, Quantum Sensing and Nanophotonic Devices V
KEYWORDS: Silicon, Sensors, Resonators, Waveguides, Refractive index, Bridges, Nanophotonics, Nanoelectromechanical systems, Reflectors, Finite-difference time-domain method

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