Dr. Aili Ting
Senior Member Technical Staff at Sandia National Labs California
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Gold, Polymethylmethacrylate, X-rays, Interfaces, Silicon, Nitrogen, Photomasks, Convection, Temperature metrology, Absorption

SPIE Journal Paper | 1 July 2004
JM3 Vol. 3 Issue 03
KEYWORDS: Photons, Electrons, Polymethylmethacrylate, Copper, Absorption, Luminescence, Aluminum, Chemical species, Interfaces, Silicon

Proceedings Article | 15 January 2003 Paper
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Polymethylmethacrylate, Metals, Luminescence, Photons, Copper, Electrons, Interfaces, Silicon, Aluminum, Absorption

Proceedings Article | 30 August 1999 Paper
Proc. SPIE. 3874, Micromachining and Microfabrication Process Technology V
KEYWORDS: Gold, Polymethylmethacrylate, Polymers, Metals, Scanners, X-rays, Ceramics, Silicon, Photomasks, Synchrotrons

Proceedings Article | 10 March 1999 Paper
Proc. SPIE. 3680, Design, Test, and Microfabrication of MEMS and MOEMS
KEYWORDS: Gold, Polymethylmethacrylate, X-rays, Silicon, Diffusion, Synchrotrons, Tolerancing, Information operations, Temperature metrology, Absorption

Showing 5 of 7 publications
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