A new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 µm, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 µm.
This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS
process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using
FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds
of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is
obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction
for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel.