Aina Wang
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | July 1, 2010
OE Vol. 49 Issue 07
KEYWORDS: Mirrors, Wavefront sensors, Reflectivity, Photomasks, Prisms, Photoresist materials, Lithography, Adaptive optics, Optical engineering, Optical components

PROCEEDINGS ARTICLE | January 4, 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Sensors, Etching, Silicon, Coating, Finite element methods, Chemical analysis, Beam shaping, Analytical research, Semiconducting wafers, Chemical fiber sensors

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