Dr. Aiwen Wu
Applications Engineer at Entegris Inc
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 23 March 2020
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Thin films, Polymers, Particles, Silicon, Coating, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Thin film coatings, Semiconducting wafers

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Optical lithography, Metals, Chemistry

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Optical lithography, Contamination, Metals, Particles, Chemistry, Manufacturing, Immersion lithography

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Polymers, Particles, Chemistry, Adsorption

Proceedings Article | 13 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Polymers, Manufacturing, Semiconducting wafers, Chromatography, Yield improvement, Industrial chemicals

Showing 5 of 13 publications
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