Dr. Ajay Agarwal
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 October 2012
Proc. SPIE. 8549, 16th International Workshop on Physics of Semiconductor Devices
KEYWORDS: Silicon, Oxides, Critical dimension metrology, Optical lithography, Etching, Nanolithography, Image processing, Sensors, Oxidation, Nanowires

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