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Dr. Akhila Mallavarapu
at Univ of Pennsylvania
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Publications (2)
SPIE Journal Paper | 12 October 2024
Ruthenium catalyst processing and oxidation for scalable complementary metal-oxide-semiconductor-compatible metal-assisted chemical etch
JM3, Vol. 23, Issue 04, 043601, (October 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.043601
KEYWORDS: Ruthenium, Etching, Heat treatments, Oxidation, Silicon, Nanowires, Dry etching, Wet etching, Porosity, Optical lithography
Proceedings Article | 13 June 2022 Poster
Effect of initial conditions on uniformity of metal assisted chemical etch for ultra-high aspect ratio, taper-free silicon nanostructures
Akhila Mallavarapu, Mark Hrdy, Mariana Castaneda, Paras Ajay, S.V. Sreenivasan
Proceedings Volume PC12056, PC120560C (2022) https://doi.org/10.1117/12.2604283
KEYWORDS: Etching, Silicon, Metals, Nanostructures, Wet etching, Plasma etching, Optical lithography, Transistors, Sensors, Semiconductors
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