Dr. Akifumi Kagayama Profile

Dr. Akifumi Kagayama

Senior Researcher at Mitsui Chemicals Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 21 March 2006 Paper

Novel high refractive index fluids for 193nm immersion lithography

Julius Santillan, Akihiko Otoguro, Toshiro Itani, Kiyoshi Fujii, Akifumi Kagayama, Takashi Nakano, Norio Nakayama, Hiroaki Tamatani, Shin Fukuda

Proceedings Volume 6154, 61544Q (2006) https://doi.org/10.1117/12.656089

KEYWORDS: Photoresist materials, Refractive index, Immersion lithography, Absorption, Neodymium, Microfluidics, Fluid dynamics, Interferometry, Lithography, Water

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years