Dr. Akifumi Kagayama
Senior Researcher at Mitsui Chemicals Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Refractive index, Microfluidics, Water, Interferometry, Photoresist materials, Immersion lithography, Neodymium, Fluid dynamics, Absorption

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