For getting information about the distribution of chemical composition, several model polymers were prepared under
different polymerization conditions and were measured by critical adsorption point-liquid chromatography (CAP-LC).
In the copolymer system of 8- and 9- (4-oxatricyclo[5.2.1.02,6]decane-3-one) acrylate (OTDA) and 2-ethyl-2-adamantyl
methacrylate (EAdMA), the peak shapes of the CAP-LC chromatogram varied according to the polymerization condition
although they indicated same molecular weight and averaged chemical composition. The difference of the CAP-LC
elution curves was related to the chemical composition distribution of copolymers for CAP-LC measurement combined
with proton nuclear magnetic resonance (1H-NMR). The terpolymers consisted of α-hydroxy-γ-butyrolactone
methacrylate (GBLMA), 2-methyl-2-adamantyl methacrylate (MAdMA) and 1-hydroxy-3-adamantyl methacrylate
(HAdMA) were prepared under various polymerization conditions. In the terpolymer system that had same molecular
weight and average chemical composition, the solubility parameter (&dgr;) and the dissolution rate were measured. The &dgr;
value and the dissolution rate curve were different among these terpolymers. It was suggested that the &dgr; value and the
chemical composition distribution of these terpolymers have a significant influence on the lithographic performance.