Dr. Akihiko Kono
at Kanazawa Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 17, 2012
Proc. SPIE. 8328, Advanced Etch Technology for Nanopatterning
KEYWORDS: Microelectromechanical systems, Polymethylmethacrylate, Tungsten, Silicon, Hydrogen, Coating, Manufacturing, Epoxies, Plating, Temperature metrology

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