Dr. Akihisa Nagano
at Ushio Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 5, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Inspection, Mirrors, Extreme ultraviolet, Laser development, Plasma, Reliability, Photomasks, Extreme ultraviolet lithography, Ruthenium, Sputter deposition

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Extreme ultraviolet, Ruthenium, Tin, Plasma, Inspection, Extreme ultraviolet lithography, Reliability, Photomasks, Ions, Mirrors

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Extreme ultraviolet, Inspection, Photomasks, Plasma, Tin, Reliability, Lithography, Feedback control, Ruthenium, Extreme ultraviolet lithography

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