Akiko Kawamoto
at Toshiba Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2013 Paper
Matthew Sendelbach, Igor Turovets, Renan Milo, Stephane Godny, Masafumi Asano, Koichi Wakamoto, Akiko Kawamoto, Kazuto Matsuki, Cornel Bozdog, Ronen Urenski
Proceedings Volume 8681, 86812D (2013) https://doi.org/10.1117/12.2012660
KEYWORDS: Metrology, Critical dimension metrology, Scanning transmission electron microscopy, Semiconducting wafers, Lithography, Polymers, Process control, Chemical elements, Geometrical optics, Directed self assembly

Proceedings Article | 10 April 2013 Paper
Akiko Kawamoto, Kazuto Matsuki, Koichi Wakamoto, Tingsheng Lin, Masafumi Asano, Stephane Godny
Proceedings Volume 8681, 86812C (2013) https://doi.org/10.1117/12.2010887
KEYWORDS: Nanoimprint lithography, Lithography, Metrology, Critical dimension metrology, Etching, 3D metrology, Coating, Process control, Transmission electron microscopy, Directed self assembly

Proceedings Article | 24 March 2009 Paper
T. Mitsui, Y. Tanaka, A. Kawamoto, S. Furukawa, K. Shibayama, Y. Yamazaki, H. Abe, S. Tsuda
Proceedings Volume 7272, 72721F (2009) https://doi.org/10.1117/12.814022
KEYWORDS: Inspection, Metrology, Lithography, Critical dimension metrology, Manufacturing, Visualization, Image acquisition, Semiconducting wafers, Process control, Image processing

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