Akiko Kawamoto
at Toshiba Corp
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Metrology, Etching, Coating, Transmission electron microscopy, 3D metrology, Process control, Directed self assembly, Nanoimprint lithography, Critical dimension metrology

PROCEEDINGS ARTICLE | April 10, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Metrology, Polymers, Process control, Directed self assembly, Critical dimension metrology, Geometrical optics, Chemical elements, Semiconducting wafers, Scanning transmission electron microscopy

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Lithography, Metrology, Visualization, Image processing, Manufacturing, Inspection, Image acquisition, Process control, Critical dimension metrology, Semiconducting wafers

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