Akiko Kawamoto
at Toshiba Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Nanoimprint lithography, Lithography, Metrology, Critical dimension metrology, Etching, 3D metrology, Coating, Process control, Transmission electron microscopy, Directed self assembly

Proceedings Article | 10 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Metrology, Critical dimension metrology, Scanning transmission electron microscopy, Semiconducting wafers, Lithography, Polymers, Process control, Chemical elements, Geometrical optics, Directed self assembly

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Inspection, Metrology, Lithography, Critical dimension metrology, Manufacturing, Visualization, Image acquisition, Semiconducting wafers, Process control, Image processing

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