Akinori Kawamura
at TASMIT Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Metrology, Data modeling, Image segmentation, Inspection, Feature extraction, Scanning electron microscopy, Machine learning, Computer aided design, Semiconducting wafers, Solid modeling

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Edge detection, Scanning electron microscopy, Precision measurement, Machine learning, Computer aided design

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