Dr. Akira Endo
General Research Manager at EUVA
SPIE Involvement:
Author
Publications (49)

Proceedings Article | 8 April 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Mirrors, Light sources, Chemical species, Particles, Carbon dioxide lasers, Magnetism, Laser irradiation, Extreme ultraviolet, Plasma, Tin

Proceedings Article | 20 March 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Mirrors, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma systems, Plasma, Laser systems engineering, Tin

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Chemical species, Ions, Carbon dioxide lasers, Laser induced fluorescence, Solids, Extreme ultraviolet, Pulsed laser operation, Plasma, Liquids, Tin

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Optical filters, Mirrors, Light sources, Reflectivity, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Optical filtering, Plasma, Tin

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Ions, Laser development, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Laser systems engineering, Tin

Proceedings Article | 14 May 2008
Proc. SPIE. 7005, High-Power Laser Ablation VII
KEYWORDS: Optical components, Optical amplifiers, Oscillators, Carbon dioxide, Laser applications, Carbon dioxide lasers, Amplifiers, Extreme ultraviolet, Pulsed laser operation, Laser systems engineering

Showing 5 of 49 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top