Dr. Akira Kojima
Researcher
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 27 June 2019
Proc. SPIE. 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Optical systems, Lithography, Electron beam lithography, Electron beams, Electrodes, Silicon, Optical fabrication, Photomasks, Display drivers, Prototyping

Proceedings Article | 21 March 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Monochromatic aberrations, Optical design, Aberration correction, Electron beams, Electrodes, Silicon, Distortion, Lens design, Objectives, Finite element methods, Optical simulations, Geometrical optics, Prototyping

Proceedings Article | 22 March 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Microelectromechanical systems, Optical systems, Lithography, Electron beam lithography, Electron beams, Electrodes, Silicon, Objectives, Finite element methods, Optical simulations, Semiconducting wafers, Prototyping, Nanolithography

SPIE Journal Paper | 11 September 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Silicon, Electrodes, Thin film deposition, Thin films, Lithography, Germanium, Metals, Printing, Semiconducting wafers, Copper

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Semiconductors, Thin films, Lithography, Electrodes, Metals, Germanium, Ions, Silicon, Parallel processing, Thin film deposition

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