Akira Mori
General Manager at KELK Ltd
SPIE Involvement:
Conference Program Committee | Author
Publications (2)

Proceedings Article | 25 February 2009
Proc. SPIE. 7202, Laser-based Micro- and Nanopackaging and Assembly III
KEYWORDS: Semiconductors, Oxides, Particles, Silicon, Laser marking, Semiconductor lasers, Laser irradiation, Silicon films, Semiconducting wafers, Pulsed laser operation

Proceedings Article | 6 November 2000
Proc. SPIE. 4088, First International Symposium on Laser Precision Microfabrication
KEYWORDS: Oxides, Second-harmonic generation, Silicon, Laser marking, Semiconductor lasers, Scanning electron microscopy, Laser irradiation, Silicon films, Photomasks, Semiconducting wafers

Conference Committee Involvement (1)
Laser-based Micro- and Nanopackaging and Assembly IV
27 January 2010 | San Francisco, California, United States
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