Dr. Akira Takada
at Topcon Corp
SPIE Involvement:
Author
Publications (14)

SPIE Journal Paper | March 4, 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Projection systems, Image processing, Fourier transforms, Optical spheres, Diffraction, Photomasks, Wave propagation, Optical lithography, Lithography, Radio propagation

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Lithography, Diffraction, Optical lithography, Optical spheres, Wave propagation, Projection systems, Transmittance, Photomasks, Geometrical optics, Semiconducting wafers

PROCEEDINGS ARTICLE | March 4, 2015
Proc. SPIE. 9344, Fiber Lasers XII: Technology, Systems, and Applications
KEYWORDS: Point spread functions, Modulation, Fiber Bragg gratings, Optical coherence tomography, Mode locking, Laser applications, Phase shift keying, Laser stabilization, Phase measurement, Signal detection

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8961, Fiber Lasers XI: Technology, Systems, and Applications
KEYWORDS: Tunable lasers, Semiconductor optical amplifiers, Modulation, Fiber Bragg gratings, Optical coherence tomography, Mode locking, Reflectivity, Semiconductor lasers, Laser resonators, Scanning probe microscopy

PROCEEDINGS ARTICLE | March 23, 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Optical lithography, Polarization, Optical resolution, Photomasks, Extreme ultraviolet lithography, Double patterning technology, Resolution enhancement technologies, Phase shifts, Light

SPIE Journal Paper | July 1, 2010
OE Vol. 49 Issue 07
KEYWORDS: Extreme ultraviolet lithography, Lens design, Optical engineering, Projection systems, Optical design, Monochromatic aberrations, Zernike polynomials, Cameras, Mathematics, Semiconducting wafers

Showing 5 of 14 publications
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