Prof. Akira Uedono
at Univ of Tsukuba
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 4, 2011
Proc. SPIE. 7939, Gallium Nitride Materials and Devices VI
KEYWORDS: Semiconductors, Defect detection, Doppler effect, Annealing, Ions, Doping, Gallium nitride, Solids, Ion implantation, Erbium

PROCEEDINGS ARTICLE | July 7, 1997
Proc. SPIE. 3049, Advances in Resist Technology and Processing XIV
KEYWORDS: Lithography, Optical lithography, Contamination, Silicon, Diffusion, Coating, Excimer lasers, Critical dimension metrology, Photomicroscopy, Chemically amplified resists

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