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Aklesh Kumar Meena
at Solid State Physics Lab
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Publications (1)
Proceedings Article | 15 October 2012 Paper
MEMS Deformable Mirrors: Technology and Applications
Amita Gupta, R. Singh, Monika Chaudhary, Shailesh Kumar, A. K. Meena
Proceedings Volume 8549, 85491B (2012) https://doi.org/10.1117/12.925268
KEYWORDS: Mirrors, Deformable mirrors, Silicon, Microelectromechanical systems, Electrodes, Wavefronts, Adaptive optics, Actuators, Micromachining, Technologies and applications
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