Aklesh Kumar Meena
at Solid State Physics Lab
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 October 2012
Proc. SPIE. 8549, 16th International Workshop on Physics of Semiconductor Devices
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Electrodes, Silicon, Wavefronts, Adaptive optics, Deformable mirrors, Micromachining, Technologies and applications

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