Prof. Alain C. Diebold
Professor Emeritus
SPIE Involvement:
Publications (30)

Proceedings Article | 10 April 2024 Presentation + Paper
Ezra Pasikatan, G. Andrew Antonelli, Nicholas Keller, Subhadeep Kal, Matthew Rednor, Markus Kuhn, Satoshi Murakami, Alain Diebold
Proceedings Volume 12955, 129550K (2024)
KEYWORDS: Etching, Silicon, Superlattices, Scatterometry, Film thickness, Germanium, Scanning transmission electron microscopy, Mueller matrices, X-ray diffraction, Metrology

Proceedings Article | 27 April 2023 Poster + Presentation + Paper
Colin Wadsworth, Ezra Pasikatan, Nicholas Keller, Andrew Antonelli, Alain Diebold
Proceedings Volume 12496, 1249619 (2023)
KEYWORDS: Nanowires, Amorphous silicon, Silicon, Mueller matrices, Silica, Gallium arsenide, Etching, Transistors, Critical dimension metrology, Matrices

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116111S (2021)
KEYWORDS: Scatterometry, Field effect transistors, Metrology, Process control, Nanowires, Spectroscopic ellipsometry, Optical lithography, Inspection, Etching, Semiconducting wafers

Proceedings Article | 20 March 2020 Open Access Paper
Proceedings Volume 11325, 1132502 (2020)
KEYWORDS: Transistors, Field effect transistors, Oxides, Scatterometry, Etching, Metrology, Crystals, Nanowires, Light scattering, X-ray diffraction

Proceedings Article | 20 March 2020 Paper
Proceedings Volume 11325, 113250W (2020)
KEYWORDS: Field effect transistors, Etching, Diffraction, X-rays, Metrology, Scattering, Data modeling, Critical dimension metrology, X-ray characterization, Nanostructures

Showing 5 of 30 publications
Conference Committee Involvement (1)
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing
19 May 1999 | Edinburgh, United Kingdom
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