Dr. Alan D. Brodie
Principal Engineer at KLA Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (11)

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Microelectromechanical systems, Electron beam lithography, Electron beams, Electrodes, Dielectrics, Coating, Reflectivity, Lens design, Atomic layer deposition, Structural design

SPIE Journal Paper | 5 August 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Electrodes, Mirrors, Microelectromechanical systems, Semiconducting wafers, Tin, Electron beam lithography, Metals, Aluminum, Coating, Reflectivity

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Logic, Monte Carlo methods, Photomasks, Line width roughness, Semiconductor manufacturing, Nanoimprint lithography, Photoresist processing

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Logic, Polymethylmethacrylate, Silica, Coating, Reflectivity, Printing, Semiconducting wafers

Proceedings Article | 4 April 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Microelectromechanical systems, Lithography, Electron beam lithography, Mirrors, Electron beams, Etching, Electrodes, Reflectivity, Semiconducting wafers, Tin

Showing 5 of 11 publications
Conference Committee Involvement (6)
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
24 February 2020 | San Jose, California, United States
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2019
25 February 2019 | San Jose, California, United States
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Showing 5 of 6 Conference Committees
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