Alan G. Jacobs
at Cornell Univ
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 7 July 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Annealing, Polymers, Scanning electron microscopy, Gas lasers, Polymer thin films, Temperature metrology, Plasma etching, Diffusion, Semiconductor lasers, Directed self assembly

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Scattering, Polymers, Annealing, X-rays, Silicon, Laser scattering, Directed self assembly, Grazing incidence, Polymer thin films, Temperature metrology

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Polymers, Annealing, Silicon, Scanning electron microscopy, Silicon films, Directed self assembly, Plasma etching, Optical alignment, Polymer thin films, Temperature metrology

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