Alan Li
at Semiconductor Manufacturing International Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Air contamination, Image processing, Ions, Distortion, Image registration, Scanning electron microscopy, Photomasks, Mask making, Semiconducting wafers, Mask cleaning

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Scanners, Manufacturing, Inspection, Computer simulations, Photomasks, Optical proximity correction, Mask making, Semiconducting wafers, Defect inspection

Proceedings Article | 3 October 2018 Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Oxides, Etching, Distortion, Oxygen, Photomasks, Plasma etching, Edge roughness, Plasma

Proceedings Article | 3 October 2018 Paper
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Semiconductors, Lithography, Particles, Photomasks, SRAF, Critical dimension metrology, Mask cleaning

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