Alan R. St. Germain
E-Beam Work Ctr Leader at Raytheon Co
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Gold, Lithography, Electron beam lithography, Optical lithography, Metals, Gallium arsenide, Silicon, Optical alignment, Silicon carbide, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top