Dr. Albert Michaeli
Senior Process Engineer at Intel Corp
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | February 14, 2007
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Modeling, Optical filters, Refractive index, Resonators, Waveguides, Polarization, Cladding, Silicon, Directional couplers, Temperature metrology

PROCEEDINGS ARTICLE | July 6, 2006
Proc. SPIE. 6350, Workshop on Optical Components for Broadband Communication
KEYWORDS: Oxides, Modeling, Optical filters, Resonators, Waveguides, Polarization, Cladding, Silicon, Wave propagation, Directional couplers

PROCEEDINGS ARTICLE | October 25, 2005
Proc. SPIE. 6017, Nanophotonics for Communication: Materials and Devices II
KEYWORDS: Lithography, Electron beam lithography, Waveguides, Etching, Silicon, Photonic crystals, Optical fabrication, Optical proximity correction, 193nm lithography, Oxidation

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Optical lithography, Contamination, Image quality, Adsorption, Software development, Photomasks, Semiconducting wafers, Pulsed laser operation, Absorption

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