Dr. Albert J. Wallash
Manager: Advanced Reliability at Maxtor Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Carbon, Thin films, Reticles, Metals, Dielectrics, Interfaces, Ions, Magnetism, Electrical breakdown

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