Mr. Alberto Andre Chang
at Simon Fraser Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX
KEYWORDS: Carbon, Capacitors, Electrodes, Polymers, Glasses, Ions, Silicon, Capacitance, Microfabrication, Semiconducting wafers

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