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Aleksandar Jovic
Senior Equipment Engineer at TU Delft
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Publications (1)
Proceedings Article | 27 April 2016 Paper
Fabrication process of Si microlenses for OCT systems
A. Jovic, G. Pandraud, K. Zinoviev, J. Rubio, E. Margallo, P. Sarro
Proceedings Volume 9888, 98880C (2016) https://doi.org/10.1117/12.2227898
KEYWORDS: Microlens, Silicon, Photoresist materials, Optical coherence tomography, Etching, Plasma etching, Image quality, Semiconducting wafers, Tomography, Infrared imaging, Photoresist processing, Surface roughness, Oxides, Dry etching, Thermal oxidation
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