Alexey A. Rezvan
at
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Thin films, Nanostructures, Switching, Resistance, Photoresist materials, Aluminum, Zinc oxide, Pulsed laser operation, Nanolithography, Lawrencium

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Nanotechnology, Etching, Gallium arsenide, Ion beams, Atomic force microscope, Plasma etching, Plasma

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Thermodynamics, Plasma, Carbon nanotubes

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