Aleksei Shulyatev
at National Research Univ of Electronic Technlogy
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Thin films, Etching, Argon, Germanium, Surface roughness, Atomic force microscopy, Scanning electron microscopy, Reactive ion etching, Antimony, Tellurium

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