The method for estimation quality and adequacy of reconstructed holographic 3D images by means of stereogrammetry
and digital image processing is proposed. The quality as a subjective parameter is considered and analyzed with the most
often used criteria, which can be applied to reconstructed 3D scene or object. The method of stereogrammetry with its
application for holographic images is considered and expressions for definition of method's accuracy are derived for
ideal and non-ideal stereopairs. The measuring accuracy of surface of holographic image estimated to be less then 25 μm
which is far below of the human eye resolution, and hence stereogrammetry method can be employed for quality
estimation in 3D holographic simulators.
An actinic EUV microscope for defect detection on mask blanks for operation in dark field using table top discharge
produced plasma (DPP) source has been developed. Several test structures (pits and bumps) and natural defects on
multilayer mirrors were characterized with an atomic force microscope (AFM) and then investigated by our
Schwarzschild Objective (SO) based EUV microscope. Possible defect detection limits with large field of view (FOV)
and moderate magnification will be discussed in terms of required source photon flux and detection camera performance.
The feasibility of using scalar diffraction theory for calculation of different telescope aperture segments influence and their surface quality represented by phase inhomogeneity on radiated field focusing quality is analyzed. An algorithm and a program for numerical calculation that are free from optical system axis symmetry and also constraint type kr>>1 is developed and described. The values of phase inhomogeneity determine the requirements for quality high aperture and/or segmented mirrors, that in general case have not axis symmetry. The influence level of factor of segment placement and its quality on resultant focusing is the metrics of Strehl ratio. Decrease of influence value of phase inhomogeneity at move off segments from axis (in case of axial symmetry) is determined, and than some increase observed at coming near the aperture edge. The developed method makes it possible to get amplitude and phase distribution for real surface and at arbitrary distances from the telescope mirror. It affords a basis for further research on image correction received from distant stars by using calculated spread function of optical system and also is very promising for resolution increasing.