Aleksey V. Timakov
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 January 2022 Paper
Proceedings Volume 12157, 1215719 (2022) https://doi.org/10.1117/12.2624348
KEYWORDS: Tungsten, Silicon, Silicon films, Rhenium, Resistance, Titanium, Nitrogen, Oxides, Very large scale integration, Copper

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