Dr. Alena Andryzhyieuskaya Profile

Dr. Alena Andryzhyieuskaya

System Engineer at ASML Netherlands BV

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Publications (2)

Proceedings Article | 22 September 2011 Paper

High-range laser bandwidth tuning for focus drilling

Alena Andryzhyieuskaya, John van Keulen, Tom van der Hoeff, Jeroen J. H. Linders, Michiel Kupers, Pablo Gabolde, Bart Smits, Takahito Kumazaki, Satoshi Tanaka, Hiroshi Tanaka, Junichi Fujimoto

Proceedings Volume 8167, 81671X (2011) https://doi.org/10.1117/12.898556

KEYWORDS: Semiconducting wafers, Laser drilling, Lithography, Fabry–Perot interferometers, Overlay metrology, Optical lithography, Extreme ultraviolet, Laser stabilization, Light sources, Scanners

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Proceedings Article | 23 March 2011 Paper

Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner

Frank Staals, Alena Andryzhyieuskaya, Hans Bakker, Marcel Beems, Jo Finders, Thijs Hollink, Jan Mulkens, Angelique Nachtwein, Rob Willekers, Peter Engblom, Toralf Gruner, Youping Zhang

Proceedings Volume 7973, 79731G (2011) https://doi.org/10.1117/12.880759

KEYWORDS: Wavefronts, Photomasks, Scanners, Source mask optimization, Optimization (mathematics), Semiconducting wafers, 3D acquisition, Reticles, Computational lithography, 3D image processing

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