Alena Sosnina
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 January 2013
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Ultraviolet radiation, Ions, Atomic force microscopy, Scanning electron microscopy, Line width roughness, Neon, Line edge roughness, Semiconducting wafers, Plasma treatment, Plasma

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