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Alessandro Polo
at Technische Univ Delft
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Author
Publications (4)
Proceedings Article | 10 April 2013 Paper
Robustness analysis of non-linear phase retrieval from single intensity measurement
A. Polo, S. Pereira, H. P. Urbach
Proceedings Volume 8681, 86812H (2013) https://doi.org/10.1117/12.2010916
KEYWORDS: Phase retrieval, Extreme ultraviolet, Wavefronts, Phase measurement, Wavefront sensors, Error analysis, Adaptive optics, Mirrors, Diffraction, Monochromatic aberrations
Proceedings Article | 26 November 2012 Paper
Experimental techniques for aberration retrieval with through-focus intensity images
S. Pereira, A. Wiegmann, N. Kumar, A. da Costa Assafrao, A. Polo, L. Wei, S. van Haver
Proceedings Volume 8557, 855706 (2012) https://doi.org/10.1117/12.2000376
KEYWORDS: CCD cameras, Diffraction, Imaging systems, Objectives, Calibration, Digital video discs, Direct methods, Interferometry, Lenses, Collimation
Proceedings Article | 23 March 2012 Paper
Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics
A. Polo, N. van Marrewijk, S. Pereira, H. Urbach
Proceedings Volume 8322, 832219 (2012) https://doi.org/10.1117/12.916154
KEYWORDS: Wavefronts, Phase retrieval, Monochromatic aberrations, Wavefront sensors, Phase measurement, Reconstruction algorithms, Extreme ultraviolet, Adaptive optics, Sensors, Computer simulations
Proceedings Article | 20 April 2011 Paper
Wavefront measurement for EUV lithography system through Hartmann sensor
A. Polo, F. Bociort, S. F. Pereira, H. P. Urbach
Proceedings Volume 7971, 79712R (2011) https://doi.org/10.1117/12.877044
KEYWORDS: Wavefronts, Reconstruction algorithms, Extreme ultraviolet lithography, Extreme ultraviolet, Sensors, Computer simulations, Monochromatic aberrations, Wavefront sensors, Interferometry, Imaging systems
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