Dr. Alex Dommann
Head of Dept at EMPA
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | December 18, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Resonators, Silicon, Microelectromechanical systems, Aluminum nitride, Tolerancing, Radiation effects, Ions, Quartz, Space operations, Ionization

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
KEYWORDS: Microelectromechanical systems, Resonators, Electrons, Ions, Silicon, Ionization, Aluminum nitride, Radiation effects, Space operations, Tolerancing

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
KEYWORDS: Microelectromechanical systems, Data modeling, Etching, X-ray diffraction, Silicon, Reliability, Resistance, Laser cutting, Microfabrication, Semiconducting wafers

PROCEEDINGS ARTICLE | March 13, 2013
Proc. SPIE. 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
KEYWORDS: Iron, Argon, Crystals, Copper, Gases, Nitrogen, Reflectivity, Oxygen, Aluminum, Single crystal X-ray diffraction

PROCEEDINGS ARTICLE | March 9, 2013
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Microelectromechanical systems, Microsystems, Resonators, Polymers, Particles, Crystals, Ions, Silicon, Epoxies, Tolerancing

PROCEEDINGS ARTICLE | February 18, 2011
Proc. SPIE. 7928, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
KEYWORDS: Microelectromechanical systems, Sensors, Crystals, X-rays, X-ray diffraction, Interfaces, Silicon, Reliability, Deep reactive ion etching, Single crystal X-ray diffraction

Showing 5 of 7 publications
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