Alex Lee
at Silterra Malaysia Sdn Bhd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 December 2005
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Modulation, Ions, Silicon, Reflectivity, Wave propagation, Profiling, Ion implantation, Semiconducting wafers, Thermal modeling, Plasma

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