Dr. Alex K. Raub
Senior Design Enginneer
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 20 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Polarization, Spatial frequencies, Interferometry, Printing, Photomasks, Optical proximity correction, Imaging arrays

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Antireflective coatings, Multilayers, Etching, Reflectivity, Fourier transforms, Semiconducting wafers, Stereolithography, 193nm lithography, Bottom antireflective coatings

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Refractive index, Lithium, Contamination, Water, Interferometry, Doping, Immersion lithography, Thin film coatings, Semiconducting wafers

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Refractive index, Prisms, Polymers, Water, Coating, Interferometry, Immersion lithography, Picosecond phenomena, Liquids

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Optical lithography, Deep ultraviolet, Interferometers, Water, Interferometry, Immersion lithography, Semiconducting wafers, Liquids, Absorption

Proceedings Article | 29 October 2001
Proc. SPIE. 4594, Design, Fabrication, and Characterization of Photonic Devices II
KEYWORDS: Quantum wells, Lithium, Magnesium fluoride, Chemical species, Annealing, Dielectrics, Gallium arsenide, Diffusion, Photonic integrated circuits, Gallium

Showing 5 of 6 publications
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