Alex Ren
at Intel Semiconductor (Dalian) Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Semiconductors, Metrology, Data modeling, Manufacturing, Computer simulations, Optical alignment, Optimization (mathematics), Semiconducting wafers, Overlay metrology

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