Dr. Alex Tregub
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Lithography, Transparency, Polymers, Glasses, Nitrogen, Oxygen, Pellicles, Absorbance, Ferroelectric polymers, Polymer thin films

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