Dr. Alexander Driskill-Smith
Director, Process Integration and Program Manager at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Thin films, Lithography, Optical lithography, Sensors, Nanoparticles, Manufacturing, Magnetism, Head, Nanoimprint lithography, Semiconducting wafers

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