Dr. Alexander Epple
at Carl Zeiss SMT GmbH
SPIE Involvement:
Conference Program Committee | Author
Publications (5)

Proceedings Article | 17 December 2014
Proc. SPIE. 9293, International Optical Design Conference 2014
KEYWORDS: Monochromatic aberrations, Mirrors, Zernike polynomials, Optical design, Spherical lenses, Imaging systems, Optical components, Aspheric lenses, Wavefronts, Optics manufacturing

Proceedings Article | 19 July 2006
Proc. SPIE. 6342, International Optical Design Conference 2006
KEYWORDS: Lenses, Lithography, Diffractive optical elements, Lens design, Colorimetry, Combined lens-mirror systems, Chromatic aberrations, Calcium, Mirrors, Optical design

Proceedings Article | 18 July 2006
Proc. SPIE. 6342, International Optical Design Conference 2006
KEYWORDS: Mirrors, Combined lens-mirror systems, Vignetting, Refractor telescopes, Optical design, Reticles, Relays, Optical lithography, Semiconducting wafers, Lithography

Proceedings Article | 15 October 2005
Proc. SPIE. 5962, Optical Design and Engineering II
KEYWORDS: Mirrors, Combined lens-mirror systems, Lenses, Lithography, Refractor telescopes, Immersion lithography, Optical design, Monochromatic aberrations, Beam splitters, Relays

Proceedings Article | 15 October 2005
Proc. SPIE. 5962, Optical Design and Engineering II
KEYWORDS: Lenses, Diffractive optical elements, Lithography, Lens design, Colorimetry, Combined lens-mirror systems, Chromatic aberrations, Calcium, Mirrors, Glasses

Conference Committee Involvement (2)
Novel Optical Systems Design and Optimization XI
13 August 2008 | San Diego, California, United States
Novel Optical Systems Design and Optimization X
28 August 2007 | San Diego, California, United States
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