Dr. Alexander Gottwald
Researcher at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Publications (13)

Proceedings Article | 4 October 2023 Presentation
Proceedings Volume PC12695, PC1269507 (2023) https://doi.org/10.1117/12.2681821
KEYWORDS: Vacuum ultraviolet, Reflectivity, Refractive index, Reflectance spectroscopy, Polarization, Absorption, Thin films, Spectroscopy, Semiconductors, Semiconductor manufacturing

Proceedings Article | 27 April 2023 Paper
Proceedings Volume 12496, 124963B (2023) https://doi.org/10.1117/12.2659369
KEYWORDS: Optical constants, Vacuum ultraviolet, Ruthenium, Extreme ultraviolet, X-rays, Thin films, Reflectometry, Monte Carlo methods, Film thickness

Proceedings Article | 13 December 2020 Presentation + Paper
Julian Heymes, Matthew Soman, Thomas Buggey, Chiaki Crews, George Randall, Alexander Gottwald, Andrew Harris, Andrew Kelt, Udo Kroth, Ian Moody, Xiao Meng, Oskar Ogor, Andrew Holland
Proceedings Volume 11454, 114541G (2020) https://doi.org/10.1117/12.2559711
KEYWORDS: Ultraviolet radiation, Image processing, Quantum efficiency, Calibration, Image sensors, Sensors, X-ray optics, X-rays, Wafer-level optics, Reflectivity

Proceedings Article | 6 July 2018 Presentation + Paper
J.-P. Halain, E. Renotte, F. Auchère, D. Berghmans, F. Delmotte, L. Harra, W. Schmutz, U. Schühle, R. Aznar Cuadrado, C. Dumesnil, M. Gyo, T. Kennedy, C. Verbeeck, J. Barbay, B. Giordanengo, S. Gissot , A. Gottwald, K. Heerlein, M.-L. Hellin, A. Hermans, V. Hervier, L. Jacques, C. Laubis, A. Mazzoli, S. Meining, R. Mercier, A. Philippon, S. Roose, L. Rossi, F. Scholze, P. Smith, L. Teriaca, X. Zhang, P. Rochus
Proceedings Volume 10699, 106990H (2018) https://doi.org/10.1117/12.2309339
KEYWORDS: Extreme ultraviolet, Calibration, Cameras, Mirrors, Optical alignment, Sensors, Telescopes, Interferometry, Fermium, Frequency modulation

Proceedings Article | 18 July 2016 Paper
Proceedings Volume 9905, 990547 (2016) https://doi.org/10.1117/12.2231405
KEYWORDS: Sensors, Calibration, Clocks, Diodes, Logic, Capacitors, Spectroscopy, Particles, Ions, Resistors

Showing 5 of 13 publications
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