Dr. Alexander E. Hess Profile

Dr. Alexander E. Hess

at IBM Research - Almaden

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Publications (2)

Proceedings Article | 23 March 2020 Paper

EUV chemically amplified resist component distribution and efficiency for stochastic defect control

Dario Goldfarb, Olivia Wang, Conor Thomas, Heather Polgrean, Margaret Lawson, Alexander Hess, Anuja De Silva

Proceedings Volume 11326, 1132609 (2020) https://doi.org/10.1117/12.2551967

KEYWORDS: Extreme ultraviolet, Polymers, Extreme ultraviolet lithography, Ions, Optical lithography, Stochastic processes, Data modeling, Interfaces, Solids, Systems modeling

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Proceedings Article | 3 October 2018 Presentation + Paper

Study of resist hardmask interaction through surface activation layers

Anuja De Silva, Luciana Meli, Jing Guo, Jennifer Church, Nelson Felix, Dario Goldfarb, Bharat Kumar, Rudy Wojtecki, Magi Mettry, Alexander Hess

Proceedings Volume 10809, 1080916 (2018) https://doi.org/10.1117/12.2501824

KEYWORDS: Polymers, Semiconductors, Interfaces, Silicon, Head-mounted displays, Etching, Electron beam lithography, Optical lithography, Semiconductor materials, Oxides

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